The stage is calibrated by support during installation. However, you may need to re-tune the stage if you are experiencing issues with the TEMPEST nozzle-to-plate alignment.
Go to the Tools menu and select Stage Tuning. The Stage Tuning dialog is displayed. Click Next.
Put the reference plate on the TEMPEST plate holder and click Next.
Adjust the stage position using the Motion Control Pad (F2) until nozzle A1 is positioned at the top-left of the reference plate.
When you have finished making adjustments, click Next.
Click Finish to save your settings.
Restart the TEMPEST software.
|
|
|
| TEC-V35R621
|